A Micro-machined Silicon Vibrating Ring Gyroscope

摘要：

The presented work focuses on the design, fabrication and frequency characteristics of a multi-mass MEMS vibrating ring gyroscope. After modal and harmonic simulation in ANSYS, the first 12 modes resonant frequencies and impacts on the sense-axis displacement are obtained. This gyroscope is fabricated through the silicon-on-glass process and deep etching bulk silicon MEMS technology. With a view to obtain the frequency characteristics, the authors attempt set of frequency sweeping experiment, whose record agrees well with ANSYS simulation results. The preliminary experimental data present the relationship between drive voltage and resonant characteristics and indicate that the structural design of vibrating ring and multi-mass can effectively depart the operational modes away from the interfering modes with a higher Q of sense axis at atmospheric pressure.

关键词： MEMS gyroscopes vibrating ring multi-mass frequency characteristic Introduction

作者: Zhang Ruixue Chen Zhiyong Zhang Rong

作者单位: Department of Precision Instruments and Mechnology Tsinghua University Beijing, China

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 62-66

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）