Enhancing the Output Power of Vibration Based Electrostatic MEMS Energy Converters for Energy Scavenging Systems

摘要：

This paper introduces three methods to increase the output power of the vibration based electrostatic MEMS energy converters. This will be done by taking the effect of the parallel capacitance of the converter in the output power equation. In addition the output power of the converter will be increased by two other ways: Firstly, by depositing dielectric materials on the sidewalk of the converter fingers, secondly, by increasing the converter thickness. In addition the output power will be increased to an optimum value by combining the effect of increasing the device thickness and depositing dielectric materials on the sidewalls of the converter fingers.

关键词： Electrostatic MEMS Energy Converter Parallel Capacitance Output Power

作者: Marwa S.Salem Basyoni A.A. Zekry H. F. Ragai

作者单位: Electronics and Communications Engineering Department, A in Shams University, Cairo, Egypt Electronics and Communications Engineering Department, Ain Shams University, Cairo, Egypt Electronics and Communications Engineering Department, French University, Cairo, Egypt

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 67-70

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）