A Method for Atomic Vapor Cell Fabrication with Cavity by Laser Drilling

摘要：

Atomic vapor cell is the most important component for atomic clock. A few vapor cells were fabricated based on multi-stack anodic bonding with four fabrication methods. By comparing with three traditional cavity fabrication methods and the first failed method by the laser drilling, it was found that the surface contamination induced in laser drilling and the roughness blocked the successful bonding. The surface roughness has to be less than 8 nm and in this case the method of laser drilling can be used successfully and with high efficiency, resulting in a novel process for atomic vapor cell fabrication with cavity.

关键词： atomic vapor cell multi-stack anodic bonding laser drilling atomic clock

作者: JianXu Qiang Lv Zhiyin Gan Sheng Liu

作者单位: School of Mechanical Science and Engineering Huazhong University of Science and Technology Wuhan, Ch Department of Electrical and Information Engineering Wuhan Polytechnic University Wuhan, China 43002

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 123-125

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）