An Investigation of the Nano-structure Titanum dioxde Thin films as a Function of Film Thickness

摘要：

Using resistive heated method, Ti films of different thickness ranging from 10 to 200 nm were deposited and post-annealed at a temperature of 473K with a flow of oxygen. The optical properties were measured by transmission spectroscopy in spectral range of 200-2500 nm. The optical functions were obtained from the Kramers-Kronig analysis of the reflectivity curves. The effective medium approximation analysis was employed to establish the relationship between the nano-structure and Effective-Media Approximation (EMA) predictions.lt was found the temperature of deposition and thefilm thickness play important roles in the nano-structure of the film and cause significant variations in the optical behaviour of thin Titanium oxide films.

关键词： Titanium oxide Spectrophotometry Thin Films Kramers-Kronig Effective Medium Approximation Optical behavior

作者: Haleh Kangarloo Fahime Farid Shaygan Saeid Rafizadeh

作者单位: Faculty of Science Islamic Azad University Urmia Branch Urmia,Iran Faculty of Science Islamic Azad University Shahriar Branch Shahre Ghods,Iran Young Researchers Club of Islamic Azad University Urmia Branch Urmiajra

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 187-190

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）