Laser Reflow Technology On High-Q Toroidal Microcavity

摘要：

Optical microcavities confine light to small model volumes and have ultrahigh quality factor (Q), especially microtoroid cavities, having very broad application prospects. In this paper, we use MEMS (Microelectromechanical System) skills, such as lithography, dry etching to fabricated silica optical microdisks. And after that, a novel processing method based on CO_2 laser reflow technology is introduced to create microtoroid cavities. The processing details are discussed including light path, laser power and other important parameters. The quality factor of the planar microtoroid cavity was measured by taper-fiber coupling and the average value reach 4.8×10～5.

关键词： Planar Microtoroid cavity Quality factor Micro process CO2 laser

作者: Pengfei Jia Yingzhan Yan Shubin Yan Min Zhao

作者单位: National Key Laboratory For Electronic Measurement Technology, North University Of China, Taiyuan, S State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision In

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 203-206

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）