Physical Level Simulation of PolyMUMPs Based Monolithic Tri-Axis MEMS Capacitive Accelerometer Using FEM Technique
In this paper, we present the design verification of PolyMUMPs based monolithic tri-axis MEMS capacitive accelerometer. The physical level simulation has been done using the analyzer module of Coventorware to verify the performance of the three-axis accelerometer using Finite Element Method (FEM) and compared with the optimized results obtained in ANSYS and in MATLAB. The 2D model is created in the designer module of Coventorware. The 3D layout is generated in the preprocessor module and mesh is created on solid model. Proposed three axis accelerometer has three individual single axis accelerometers, integrated on a single substrate uniformly centered on single axis. Low mechanical noise, high sensitivity and sense capacitance have been measured for all axes individually and presented. The results obtained from both the analytical and finite element models are found to be in excellent agreement
Accelerometer Coventorware FEM MEMS tri-axis
M. S. Khan A. Iqbal S. A. Bazaz M. Abid
Department of Electrical Engineering, COMSATS Institute of Information Technology, Lahore, Pakistan Faculty of Electronic Engineering, Ghulam Ishaq Khan Institute of Engineering Sciences & Technology, Faculty of Computer Science and Engineering, Ghulam Ishaq Khan Institute of Engineering Sciences & T Faculty of Mechanical Engineering Ghulam Ishaq Khan Institute of Engineering Sciences & Technology,
国际会议
2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)
长沙
英文
213-217
2010-12-14（万方平台首次上网日期，不代表论文的发表时间）