Experimental Modal Characterization of MEMS Switches

摘要：

MEMS devices, Micro Electro-Mechanical Systems, are electrical and mechanical systems with characteristic dimensions on the order of microns. Since these systems have moving mechanical parts, characterization of their dynamics, including their modal parameters, is highly desirable. This paper describes the validation of an existing implementation of the Stochastic Subspace Identification (SSI) algorithm, called MACEC, for experimental modal analysis of a micro-cantilever switch. A white noise signal applied to the built-in electrostatic actuator in the switches excited a response measured using microscanning Laser Doppler Vibrometry (LDV). The modal parameters found using MACEC matched well those predicted by theory, thus validating this combination for experimental modal analysis of MEMS structures.

关键词： component experimental modal analysis MEMS switch MACEC experimental validation laser Doppler vibrometry output only identification

作者: Joel M. Book Samuel F. Asokanthan Tianfu Wang

作者单位: Dept. Mech. and Materials Engineering, The University ofWestern Ontario, London, Ontario, Canada N6A Ingersoll Rand Engineering Technology Center 1 IF Raffles City, 268 Central XiZang Rd. Central Shang

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 261-265

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）