Simulation and characterization of a novel large stroke micromirror
This paper reports on the simulation and characterization of a microelectromechanical system (MEMS) micromirror fabricated with PolyMUMPs. The overall diameter of the hexagonal micrimirror, including mirror plate and 3 supporting cantilevers fixed around, is 450um. A 3D model is built in finite element method (FEM) with COMSOL. Simulations of the elevated height of mirror plate, pull-in voltage and eigenfrequency of the micromirror are carried out. The static and dynamic performances of the fabricated micromirror are characterized by Veeco Optical Profiler and Polytek MEMS System Analyzer. The comparison between measurement and simulation exhibits good concordance. Surface topography measurement shows the elevated height and stressinduced concave deformation of mirror plate almost the same scale as demonstrated in FEM simulation. The pull-in voltages are measured to be around 32V in current-voltage curve which is almost the same as in FEM simulation with one electrode biased. The fundamental resonant frequency is measured to be 4.3k Hz in torsional motion and 4.9k Hz in piston motion.
MEMS micromirror FEA characterization
Quan Sun Zongfu Jiang Edmond Cretu
College of Optoelectronics Science and Engineering, National University of Defense Technology No.47, Department of Electrical and Computer Engineering University of British Columbia, 2332 Main Mall, Va
国际会议
2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)
长沙
英文
331-335
2010-12-14（万方平台首次上网日期，不代表论文的发表时间）