A Monolithic Three-Axis Accelerometer with Low Cross-Axis Sensitivity

摘要：

A 50,000g three-axis accelerometer using a single proof mass is presented. The sensitive structure is made of a single proof mass and eight cantilever beams. Twelve piezoresistors are placed on the cantilevers symmetrically, which can be used to detect 3-dimensional acceleration. The symmetric placement of the piezoresistors brings the reasonable sensitivity and simultaneously decreases the crossaxis sensitivity significantly. Simulation results show that the sensitivity in X-, Y- and Z-axis are 0.806uV/g, 0.806uV/g and 3.71uV/g respectively with 5V supply and the cross-axis sensitivities are all less than 2.4％, which ensures the high performance of the three-axis accelerometer.

关键词： accelerometer three-axis piezoresistor sensitivity cross-axis sensitivity

作者: Changde He Wendong Zhang Jijun Xiong Chenyang Xue Guixiong Shi

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education Science and T Science and Technology on Electronic Test & Measurement Laboratory North University of China, NUC Ta

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 343-346

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）