Optimization of Fabrication Process for MEMS based Microneedles Using ICP Etching Technology

摘要：

In this paper, optimization of fabrication process for microneedles has been presented. Using inductively coupled plasma (ICP) etching technology, fabrication of out-of-plane hollow silicon microneedles for blood extraction has been carried out. Sharp tip microneedles with length 1100 μm were designed for fabrication. The fabrication of microneedles was not successful because the lumen section was fabricated first and then hole was created for fluid flow. Previously, using same fabrication method successful fabrication of microneedles was done for drug delivery with length 200 fJm. This fabrication method is not suitable for long structure. Thus, the alternative microneedle fabrication steps using ICP etching have been developed and presented in this paper. These steps can be more optimized and suitable for sharp tip, long and hollow structure.

关键词： Silicon microneedles ICP etching Blood extraction Drug delivery

作者: Muhammad Waseem Ashraf Amporn Poyai Shahzadi Tayyaba Nitin Afzulpurkar Asim Nisar Chumnam Punyasai Karoon Saejok Jakrapomg Supadech Nithi Atthi Charndet Hruanun

作者单位: School of Engineering and Technology Asian Institute of Technology (AIT) Bangkok, Thailand Thai Microelectronic Center (TMEC) Bangkok, Thailand

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 356-359

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）