Postbuckling Investigation on the Micromachined Double-Clamped Beams
In this paper, thermal postbuckling of a beam-like structure subjected to a uniform thermal loading is studied both theoretically and experimentally. In theory aspect, the equations governing the axial and transverse deformations of beams are derived. The two equations are reduced to a single nonlinear fourthorder integral-differential equation governing the transverse deformations. The analytical method presented here offers a simple yet efficient solution approach to analyze the bistable behavior of raicrobeam or beam-like structures under thermal loading. Then, microfabricated double-clamped beams are chosen as experimental object due to its precise dimensions and easy loading method. The lab-made HF vapor system was used to release the suspended structures with satisfactory results. After the fabrication and measurement, by comparing the theoretical results with experimental results, an excellent agreement is gotten. It proves not only the validity of the solution obtained here, on the other hand, importantly, it also demonstrates a new field for MEMS as another easy and accurate tool to investigate mechanics problems. With the accurate solutions for posbuckling beams, we apply it into new electrothermal postbuckling actuators, a big deflection promising the possibility of a new kind of actuator.
postbuckling beams microbeams thermal actuators
Xing Chen Liansheng Ma Yingmei Zheng Bo Wang Dong-Weon Lee
MEMS & Nanotechnology Laboratory, School of Mechanical Systems Engineering Chonnam National University, Gwangju, Republic of KOREA
国际会议
2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)
长沙
英文
372-375
2010-12-14（万方平台首次上网日期，不代表论文的发表时间）