Design and Modeling of a Wide Tuning Range, High Q, Low Supply Voltage MEMS Based Tunable Capacitor for Wireless Communication Applications

摘要：

A simulation model for the analysis of MEMS capacitor has been developed using mechanical equivalencies. The capacitor structure used in this paper has four parallel plates to improve the tuning range. Two of the plates are suspended and the other two plates are fixed. The developed mechanical model is validated with the help of structure simulations performed using Pol) Mumps process. The simulation results show good correlation between the equivalent mechanical model and the structural model. The tuning range of the mechanical model developed is 2.465:1 where as the PoIyMumps fabricated capacitor produces a tuning range of 2.4555:1.The mechanical resonant frequencies of the top and bottom suspended plates are simulated as 501 rad/sec and 706 rad/sec respectively.

关键词： Mechanical model MEMS capacitor

作者: Sreeja B.S Radha S

作者单位: Research Scholar, Sathyabama University, 2Prof and Head Department of ECE, SSN College of Engineering

会议类型: 国际会议

会议名称: 2010 6th International Conference on MENS NANO,and Smart System(2010年微机电纳米、智能系统国际会议 ICMENS 2010)

会议地点: 长沙

会议语种:英文

页码: 387-391

在线出版日期: 2010-12-14（万方平台首次上网日期，不代表论文的发表时间）