THE CHARACTERISTICS OF A PRECISION INCHWORMTYPE PIEZOELECTRIC ACTUATOR WITH VERTICAL MOVEMENT
In order to provide the basic theory and reference for the vertical actuator, a precision piezoelectric actuator is designed in the paper. Firstly, working principle and mechanical design are presented. Then motion principles of this actuator are investigated. Finally some characteristics are analyzed including output characteristics, load characteristics and frequency characteristics. The research results reveal that, the step distance is adjustable, and it can reach 1.4μm when the drive voltage is 120V. By gravity, the step distance of crawling up is less than crawling down. With the increasing of the driving voltage, the actuator load capacity is on linear growth. The displacement of actuator has a non-linear relationship with the frequency of drive signals. To sum up, the vertical actuator is a stable but multivariable system, the performance of their campaigns is affected by a variety of factors.
piezoelectric actuator vertical movement characteristic
L.N. Wang J.B. Liu S.P. Guo L. Han
Institute of electrical engineering, Chinese academy of sciences, Beijing, 100190, china Graduate Un Institute of electrical engineering, Chinese academy of sciences, Beijing, 100190, china
国际会议
北京
英文
274-281
2010-11-23（万方平台首次上网日期，不代表论文的发表时间）