MAM Capacitor in RF MEMS Tunable Networks

摘要：

This paper presents Metal-Air-Metal (MAM) capacitors fabricated by bulk micromachining technology. Maxwell 3D software was used to improve the capacitance accuracy of the design by considering the fringing effect. The MAM capacitors were fabricated successfully and have very accurate capacitance of fF scale. The results show good consistency and the error between measured and simulated capacitance is less than 8％.

关键词： MAM capacitor bulk micromachining RF MEMS bonding fringing effect wet etching

作者: Sheng Wu Jinwen Zhang

作者单位: National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics Peking U National Key Laboratory of Micro/Nano Fabrication Technology, Institute of Microelectronics Peking U

会议类型: 国际会议

会议名称: 2010 International Conference on Measurement and Control Engineering(2010年IEEE测量与控制工程国际会议 ICMCE2010)

会议地点: 成都

会议语种:英文

页码: 394-397

在线出版日期: 2010-11-16（万方平台首次上网日期，不代表论文的发表时间）