An Out-of-plane Motions Estimation Method for Testing MEMS Dynamic Characterization

摘要：

Measurement for dynamic characterization of microelectromechanical systems (MEMS) structure is important for MEMS design and fabrication. A new data analysis method is presented to extract out-of-plane motions from interferograms. In this method, spin filters firstly are applied to remove noise in the interferograms which were captured by a measurement system and could depicted the motion over the moving period, and then out-of-plane motions of MEMS structures can be acquired from these interferograms by five-step phase shift interferometry (PS1) algorithm and branch cut unwrapping algorithm. The experimental work conducted on an AFM cantilever confirms that the new motions estimation method is effective to compute out-of-plane motions of MEMS structures, and the error of measurement repeatability of amplitude is less than 10 nm.

关键词： out-of-plane motions MEMS noise removal spin filter dynamic characterization

作者: Yongjun Xie

作者单位: School of Electrical Information Jinan University Zhuhai, China

会议类型: 国际会议

会议名称: 2010 International Conference on Measurement and Control Engineering(2010年IEEE测量与控制工程国际会议 ICMCE2010)

会议地点: 成都

会议语种:英文

页码: 474-477

在线出版日期: 2010-11-16（万方平台首次上网日期，不代表论文的发表时间）