Research of Real-Time Spectrum Measurement Technology in Thin-Film Thickness Wideband Monitoring System
Tranditonally, the mechanical scanning is realized by alternate rotation of monochromcters grating driven by the stepper motor and the photomultiplier tube is used for detect ion,which completes the spectrum measurement to control the thin-film thickness,This cant perform the spectrum real-time measurement.In thin-film thickness wideband monitoring system. the grating spectrometer is utilized to proceed spectral dispersion,linear CCD is used to quickly finish spectrum scanning once,for achieving the correct spectrum information,the parameters of grating and CCD were determined,the slit width of spectrometer was adjusted to 1.4mm,which satisfies the requirement of spectrum resolution 2nm ; The spectrum calibration was done by least-squre fitting , the calibrated wavelength root-mean-square error is 0.037nm; The compensation structure and correction algorithm are applied to expand the spectrum measurement range of 200nm; the wavelet threshold filtering optimization algorithm supresses random noise and reserves the spectrum signal details , the peak error of signal is 0.7％～1.0％,the peak location one is 0.1 ％～0.3％. This ensures the monitoring effectiveness.
spectrum real-time measurement thin-film thickness spectrum resolution spectrum calibration spectrum compensation noise processing
Shang Xiao-yan Han Jun
School of Optoelectronics Engineering Xian Technological University Xian, China School of Optoelectronics Engineering Xian Technological University Xian, China School of Technica
国际会议
2010 International Conference on Measurement and Control Engineering(2010年IEEE测量与控制工程国际会议 ICMCE2010)
成都
英文
528-532
2010-11-16（万方平台首次上网日期，不代表论文的发表时间）