An Active CMOS LPF for MEMS Capacitive Accelerometer Readout

摘要：

This paper presents an active low-pass filter with its bandwidth ranging from 100Hz to 8kHz. The signals lower than 500Hz are filtered through the switched capacitor low-pass filter, while those higher than 500Hz are filtered through the continuous-time one. Problems such as charge injection and clock feedthrough in the switched-capacitor circuit are also analyzed and worked out in this design. We use the optimal switch sequence to help eliminate the nonlinearity caused by the charge injection, dummy switches to reduce the coupled charge, and a folded cascode differential input stage with high PSRR to restrain the interference from the power supply. The circuit performance, therefore, has been greatly improved with a half area sharply reduced below 500Hz, especially meeting the needs of MEMS capacitive accelerometer readout.

作者: Jianghua Chen Xuewen Ni Bangxian Mo

作者单位: School of Information Science and Engineering, Shandong University, Jinan 250100, China Institute of Microelectronics, Peking University, Beijing 100871, China

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 333-335

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）