Youngs Modulus Detection of Low-k Film by Laser-generated Surface Acoustic Waves with Improved Matching Algorithm
Laser-generated surface acoustic waves (LSAWs) technique is a nondestructive method for the determination of Youngs modulus of thin fragile low dielectric constant (low-k) films. In some cases, there are errors which cannot be ignored of the experiment measuring dispersion curves. Therefore, an improved matching algorithm is proposed to solve this problem by aligning the theoretical dispersion curve with the experimental one. The low-k film sample with SiOCH material deposited on Si (100) plane substrate is detected in the experiment. The result indicates that the Youngs modulus of thin low-k films could be successfully determined by LSAWs technique with the improved matching algorithm.
Xing-Meng Shan Xia Xiao Ya-Liang Liu
School of Electronic and Information Engineering, Tianiin University, Tianjin 300072, China
国际会议
上海
英文
1000-1002
2010-11-01（万方平台首次上网日期，不代表论文的发表时间）