Scaled Silicon Nanoelectromechanical (NEM) Hybrid Systems

摘要：

In this paper we overview recent attempts at cointegrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in More-than-Moore domain and also explore novel operating principles in Beyond CMOS domain.

作者: Hiroshi Mizuta Shunri Oda Mario A. Garcia-Ramirez Faezeh. A. Hassani Mohammad. A. Ghiass Nima Kalhor Zakaria Moktadir Yoshishige Tsuchiya Shunichiro Sawai Jun Ogi

作者单位: NANO Group, School of Electronics and Computer Science, University of Southampton, Southampton, UK Quantum Nanoelectronics Research Center, Tokyo Institute of Technology, Tokyo, Japan

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1198-1201

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）