A Flexible, Highly-Sensitive, and Easily-Fabricated Carbon-NanoTubes Tactile Sensor on Polymer Substrate
A flexible, highly-sensitive, and easily fabricated carbon nanotubes (CNTs) tactile sensor is reported in this paper. CNTs are grown and patterned on bulkmicromachined silicon substrate with 3-dimensional surface profile. After polymer molding, the CNTs with 3-dimensional distribution are successfully transferred onto a flexible PDMS with 3-dimensional tactile-bump. Advantages of presented tactile sensor are (1) exactly determine loading force by resistance change due to almost linearly current-voltage (I-V) characteristics, (2) embedded patterned CNTs into polymer using simple silicon-substrate molding process, (3) 3-dimensional distributed CNTs enable the detection of shear and normal forces, and (4) 3dimensional polymer structure by molding as a tactile-bump. One of anisotropic-type patterned CNT approach behaves good sensing sensitivity of both normal (23％/N) and shear (18％/N) forces loading. With proper CNTs designs, tactile sensor has normal and shear forces sensitivities of up to 23％/N and 95％/N, respectively.
ChiaHua Ho Wang-Shen Su Chih-Fan Hu Chia-Min Lin Weileun Fang Fu-Liang Yang
National Nano Device Laboratories, Hsinchu 300, Taiwan National Tsing Hua University, 300, Taiwan National Nano Device Laboratories, Hsinchu 300, Taiwan National Tsing Hua University, 300, Taiwan
国际会议
上海
英文
1388-1391
2010-11-01（万方平台首次上网日期，不代表论文的发表时间）