Single-walled Carbon Nanotue Pirani Vacuum Gauge

摘要：

This paper presents the design, fabrication and synthesis of a carbon nanotube Pirani vacuum gauge which comprises 5-μm-long SWNTs as heater and Au/W as electrodes. Results show that the TCR of SWNTs is negative and about -0.004/℃. SWNTs Pirani vacuum gauge was demonstrated with a dynamic range of 2500Pa to 40Pa in air environment. The average sensitivity of SWNTs Pirani vacuum gauge is about 914Ω/Pa and the power consumption is lower thanl OuW.

作者: Wei Li Zhihui Wang Jinwen Zhang

作者单位: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelect National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelect

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1407-1409

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）