Design and Simulation of High-Frequency (>100 MHz) Ultrasonic Phased Array Transducer

摘要：

This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f>100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO3) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element crosstalking and the element electrical impedance are also calculated.

作者: Jin-Ying Zhang Wei-Jiang Xu Xin-Ming Ji Julien Carlier Bertrand Nongaillard Yi-Ping Huang

作者单位: Departement dOpto-Acousto-Electronique, IEMN, CNRS UMR 8520, Universite de Valenciennes, 59313 Vale Departement dOpto-Acousto-Electronique, IEMN, CNRS UMR 8520, Universite de Valenciennes, 59313 Vale ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, Ch

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1422-1424

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）