A Ka-Band 3-bit RF MEMS Switched Line Phase Shifter Implemented in Coplanar Waveguide

摘要：

A Ka-band 3 bit RF MEMS switched line phase shifter implemented in coplanar waveguide (CPW) on Borofloat? glass substrate is presented. The basic switched line phase shifter unit is composed of two single-pole double-throw (SPDT) switches with phase offset transmission line lengths. Air-bridge with step compensation technique is used to improve the mm-wave performance of CPW discontinuities such as bend and Tee-junction. The SPDT switch composed of matched Tee-junction and two compact metal-to-metal contact series MEMS switches is optimized to obtain broad band performance. The three-bit phase shifter is designed to shift 0°, 45°, 90°, 135°, 180°, 225°, 270°, 315° at 35GHz and the measured RMS phase error is only 2.3°. The average insertion loss over all states is 2.35dB. Return loss is better than 12dB at Ka band for all eight states.

作者: Zheng Wang Zewen Liu Xiang Li

作者单位: Institute of Microelectronics, Tsinghua University, Beijing 100084, China

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1450-1452

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）