A low-noise interface circuit for MEMS vibratory gyroscope
A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35μm standard CMOS process with an area of 2.5×2.5mm2. The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply.
Ran Fang Wengao Lu Chang Liu Zhongjian Chen Yuan Ju Guannan Wang Lijiu Ji Dunshan Yu
Key Laboratory of Microelectronic Devices and Circuit, Department of Microelectronics, Peking Univer School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332
国际会议
上海
英文
1456-1458
2010-11-01（万方平台首次上网日期，不代表论文的发表时间）