THE ELECTRO-THERMAL RESPONSE PROPERTIES OF MIRO PIRANI VACUUM GAUGE

摘要：

In this paper, a micro vacuum pirani gauge made of single crystal silicon has been developed and its temperature and DC current response properties in different pressures were firstly studied detailedly. The resistance of it increases with the temperature exponentially. There is a current threshold resulting from the materials characteristics and the precision of the instrument at low pressure. And the DC current threshold increases with the pressure. Besides, Higher DC current and lower pressure will leads to longer temperature stabilized time.

作者: Jinwen Zhang Long Wang Xin Wang Wei Jiang

作者单位: National Key Lab of Micro/ Nanometer Fabrication Technology, Institute of Microelectronics, Peking U National Key Lab of Micro/ Nanometer Fabrication Technology, Institute of Microelectronics, Peking U National Key Lab of Micro/ Nanometer Fabrication Technology, Institute of Microelectronics, Peking U

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1462-1464

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）