Ultra low power solenoid MEMS fluxgate sensor with amorphous alloy core

摘要：

A novel micromachined fluxgate sensor with integrated solenoid coils and amorphous alloy core is developed. The ultra low power consumption is achieved due to amorphous alloys ribbon materials and optimized core structure. The device exhibits a power consumption of 2.4mW, a sensitivity of 55V/T and a linear range of 150μT-150μT as excitation current of 40mA at 40kHz.

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1471-1473

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）