An Acceleration Latching Switch With Flexible Contacts and Barb Latching Mechanism

摘要：

A micro-acceleration latching switch with barb latching mechanism is presented in this paper. The latching mechanism which likes a barb can make the switch latch reliably. Whats more, the flexible contacts can prevent the switch from opening due to impact resulting from the rebound or vibration of proof mass when the switch is latched. The stops which limit displacement will also improve the reliability of the switch. The switch was fabricated by low-cost process and tested. The measured latching shock is 1700g and the response time is less than 0.3ms. The isolation resistance is more than 200M ohms and the on-state resistance is no more than 15 ohms.

作者: X.Y.Zhang Z.Y.Guo H.T.Ding Z.C.Yang GZ.Yan

作者单位: National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing 100871. China

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1495-1497

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）