会议专题

Study on Switching Performance of VOX Thin Film in THz Band

Vanadium oxide(VOx) is one kind of mixture with different valences, and in addition to vanadium dioxJde(VO2), the optical properties of other vanadium oxidations with different valences get few attention. In the present study, VOX thin film was grown on silicon substrates by direct current facing targets magnetron sputtering. VOX thin film was characterized by XPS (X-ray photoelectron spectroscopy) to determine component, and by THz-TDS (THz Time-domain spectroscopy system) to determine optical transmission behavior in the 0.3~2.5THz with the exciting laser of 532nm, The results show that, the main valences of VOX thin film are +3,+4,+5, before and after continuous light excitation, a very significant change in THz transmission is observed. The optical transmission of VOX thin film decreases by 60% after excitation. And finally, we briefly analyzed the switching performance with the energy band structure of VOX.

VOX optical property THz-TDS

Tao Chen Ming Hu Lei Tan Liu-Chen Wang Li Li

Sensitive Materials & Sensors Lab, School of Electronic Information Engineering, Tianjin University, Tianjin 300072, P. R. China

国际会议

2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

上海

英文

1560-1562

2010-11-01(万方平台首次上网日期,不代表论文的发表时间)