Normalized Differential Conductance Spectroscopy to study the tunneling properties of post soft breakdown SiO2

摘要：

Normalized Differential Conductance Spectroscopy (NDCS) has been used to investigate the tunneling properties of post soft breakdown SiO2. It is shown that the NDCS is capable of separating various components of tunneling current and determining its corresponding tunnel constants of post SBD SiO2. Therefore, the most important tunneling parameters: the effective mass of tunneling electron in SBD SiO2, and the effective potential barrier height at the Si/SiO2 interface can be determined independently from the NDCS.

作者: Mingzhen Xu Changhua Tan

作者单位: Institute of Microelectronics, Peking University,Beijing, 100871, PR China

会议类型: 国际会议

会议名称: 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology(第十届固态和集成电路技术国际会议 ICSICT-2010)

会议地点: 上海

会议语种:英文

页码: 1572-1574

在线出版日期: 2010-11-01（万方平台首次上网日期，不代表论文的发表时间）