Effective threshold voltage shift: a measure for NBTI removing uncertainty in mobility degradation

The conventional threshold voltage shift measured by extrapolating transfer characteristics, AVth(ex), underestimates the NBTI-induced degradation of drain current, △Id. Mobility degradation, Au, has been proposed as a potential contributor to △Id. Evaluating Au, however, can be problematic and controversial. For test engineers, it is desirable to include all degradations in one parameter and we propose the effective threshold voltage shift, AVeff, as such a parameter. A method for evaluating AVeff is given, which only requires standard NBTI tests and samples and is easy to implement. It will be shown that good agreement can be achieved between the measured △Id and that predicted from AVeff without evaluating Aμ. The advantage of using AVeff over Aid/Id is that it does not depend on device size and source/drain series resistance.
J. F. Zhang Z. Ji L. Lin W. Zhang
School of Engineering, Liverpool John Moores University, Liverpool L3 3AF, UK School of Engineering, Liverpool John Moores University, Liverpool L3 3AF, K
国际会议
上海
英文
1600-1603
2010-11-01(万方平台首次上网日期,不代表论文的发表时间)