On Dynamic Behavior of Triangular Shaped Cantilevers in MEMS Sensors: Effect of Curvature
A study on the effect of curvature of triangular shaped cantilevers in MEMS sensors was presented. 3-D models were performed by using the SolidWorks software. And modal analysis and harmonic response analysis were carried out on different types of geometrically configured triangular shaped cantilevers using ANSYS software. The results included the variation of natural frequencies of cantilevers and maximum equivalent von mises strain on the cantilevers with respect to radius of curvature of triangular shaped cantilevers. According to the finite element analysis results, the curvature did affect dynamic behavior of triangular shaped cantilevers in MEMS sensors. Usually, the curvature is induced by the surface stress due to microprocessing or any change of temperature, etc. Therefore, in order to achieve a steady state of strain for the MEMS sensors, its better to eliminate the surface stress and make the cantilever transform from a curved cantilever to a straight cantilever.
Gui-Ming Zhang Li-Bo Zhao En-Ze Huang Guo-Ying Yuan Yong Li Zhi-Gang Liu Zhuang-De Jiang
State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, 710049 State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, Xian, 710049 State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China State Key Lab of Multiple Flow in Power Engineering, Xian Jiaotong University, Xian, 710049, China
国际会议
上海
英文
1937-1939
2010-11-01（万方平台首次上网日期，不代表论文的发表时间）