Optical Waveguide Formed in a LiTaO3 Crystal by Using MeV C3+Ion Implantation
(0) Planar waveguides were formed in LiTaO3 crystals by using 6.0-MeV C3+-ion implantation at room temperature. The prism-coupling method was used to take dark mode measurements at both 633 nm and 1539 nm. The reflectivity calculation method was used to reconstruct the refractive index profile in the waveguide. TRIM98 (Transport of Ions in Matter) was also used to simulate the damage distribution in the LiTaO3. Barrier-confined waveguides were found to be formed in LiTaO3. Possible reasons for the different refractive-index profiles in the LiTaO3 and the LiNbO3 waveguides are discussed.
Optical waveguides Ion implantation LiTaO3 Refractive index profile
Gang Fu Xi-Feng Qin Xue-Lin WANG
School of Science, Shandong Jianzhu University, Jinan 250101, China Department of Physics, Shandong University, Jinan 250100, China
国际会议
2009 Korea-China Symposium on Advanced Functional Films for Information(2009中韩先进信息功能薄膜研讨会)
兰州
英文
1364-1368
2009-08-16（万方平台首次上网日期，不代表论文的发表时间）