Morphology Characterization and Mechanism Analysis of the Microstructure of LiNbO3 Crystals Fabricated by Using Focused Ion Beam Milling

This paper reports the basic results obtained from an investigation of the microstructure of lithium niobate (LiNbOa) crystals fabricated by using the focused ion beam (FIB) sputtering method. The morphology characterization of the microstructure is explained in terms of scanning electron microscopy observations based on the geometrical integrity, surface smoothness, cross-sectional area, aspect ratio, etc. The optimized micro-fabrication conditions and the sample morphology characterization are presented, and the sputtering rate of Ga ions for a 30-keV energy milling of the LiNbO3 crystal is calculated, which is lower than the theoretical one gained from The Stopping and Range of Ions in Matter (SRIM) sputtering simulation due to the redeposition effect being enhanced with increasing milling depth
Focused ion beam Sputtering Nonlinear optical crystals
Peng Liu Qing Huang Xue-Lin Wang Xue-Feng Xu Sha Yan
School of Physics and State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100 C State Key Laboratory of Nuclear Physics and Technology,Institute of Heavy Ion Physics, Peking Univer
国际会议
2009 Korea-China Symposium on Advanced Functional Films for Information(2009中韩先进信息功能薄膜研讨会)
兰州
英文
1369-1373
2009-08-16(万方平台首次上网日期,不代表论文的发表时间)