Study on Si-based Plate Microstructure Gas Sensor Integrated with Temperature Sensor

摘要：

The core of microstructure gas sensor is the micro-heating plate (MHP), which integrates the heating electrode, temperature sensor, and signal electrode on Si-based films. The Si-based plate microstructure gas sensor was fabricated by introducing Lift-off technique and laser micromachining, with a heating electrode of its linewidth of 50 μm. The Si-based electrodes were welded and encapsulated, and the relationship between temperature and power consumption was given through the temperature characteristics. Finally, the feasibility of this structure design was investigated.

关键词： MEMS thermal stress lift-off gas sensor

作者: Wenjie Zhao Zhen Zhou Yunbo Shi Dongsheng Hu

作者单位: The higher educational key laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Measurement-Control Tech & Communications Engineering College Harbin Univ. Sci. Tech., Harbin, China

会议类型: 国际会议

会议名称: The 4th International Symposium on Computational Intelligence and Industrial Application(第四届国际计算智能和工业应用研讨会)

会议地点: 哈尔滨

会议语种:英文

页码: 279-282

在线出版日期: 2010-08-01（万方平台首次上网日期，不代表论文的发表时间）