Study on the Porous Alumina MEMS Chip of Electrochemical Directoral Growth Based on Aluminum Film
In this paper, aimed at the problem that the template shape is very easy to be destroyed,when the porous alumina membrane is peeled off from the aluminum substrate, a new method of preparing porous alumina MEMS chip is proposed. Uing the method of DC sputtering, sputtering aluminum on the ceramic or glass substrate, and then in the weak acid electrolyte, through the method of anodic oxidation, the porous alumina MEMS chip is obtained. The influences to the porous membrane of the annealing, electrochemical polishing, the electrolyte concentration, constant current anodic oxidation and constant voltage anodic oxidation are discussed, and the best technology of preparing the porous alumina membranes MEMS chip is obtained.
Aluminum Film Porous Alumina Membrane MEMS Chip Electrochemical Directional Growth
Qiaohua Feng Lining Sun Yunbo Shi Dan Wu
The higher educational key laboratory for Measuring & Control Technology and Instrumentations of Heilongjiang Province, Measurement-Control Tech & Communications Engineering College Harbin Univ. Sci. Tech., Harbin, China
国际会议
哈尔滨
英文
283-286
2010-08-01（万方平台首次上网日期，不代表论文的发表时间）