Reclamation of TMAH from Developer Waste by Membrane Technology
Discharge of developer waste had given huge environmental load due to its high pH, NH3-N, and COD. The conventional treatments like the chemical and biological methods arent capable of meeting the ammonia-nitrogen discharge standards. Tetramethylammonium Hydroxide (TMAH) is the most popular developer adopted in the photolithography process of LCD electronic industries, it is recovered, purified, and concentrated from developer waste using a proposed reclamation system including the membrane technology and advanced electrolysis method. The exploitation of membrane technology for the treatment of developer waste is investigated by a feed and breed membrane (RO and NF) process. A specific membrane process sequence, and the suitable operating conditions are proposed to optimize this system; some interesting interface phenomena like the Donnan equilibrium is investigated and utilized in the application of NF. Reclaimed developer features analytically not only the same purity as commercial fresh one but also a more concentrated form. Both the high recovery (90％) and concentrated product achieved in this system give large advantages of saving the operating costs as well as reducing environmental load.
developer concentrated THAH reclamation system membrane technology NF RO Donnan equilibrium
Chen-Chang Chang Hung-Wei Chen Chih-Cheng Chia Chao-Chung Kuo
Capital Engineering Corporation, Taiwan Chang Chun Petrochemical Corporation, Taiwan Department of Chemical and Materials Engineering, Tamkang University, Taiwan
国际会议
2010 Asia-Pacific Conference on Desalination and Water Reclamation(2010 亚太脱盐大会)
青岛
英文
197-208
2010-06-22（万方平台首次上网日期，不代表论文的发表时间）