An Automated Design Flow for MEMS Accelerometers with Sigma-Delta Control

摘要：

This contribution presents a novel methodology for automated optimal design of MEMS accelerometers embedded in electronic control circuitry from user deγned high-level performance speciγcations and design constraints. The proposed approach is based on simulation-based optimisation where automated conflguration selection for electronic blocks and synthesis of mechanical layouts are coupled with calculations of optimal design parameters. The underlying dedicated MEMS simulator supports distributed mechanical dynamics to enable accurate performance prediction of critical mechanical components, such as acceleration sensing elements which form an essential part of the mixed-technology control loop.

作者: Chenxu Zhao Tom J.Kazmierski

作者单位: School of Electronics and Computer Science University of Southampton,UK

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-6

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）