Piezoelectric Dynamic Pressure Sensor

摘要：

This paper presents a novel piezoelectric dynamic pressure sensor, it consists of sensing element and inner preamplifier. The piezoelectric unimorph was used as sensing element. The charge amplifier with high input impedance was used to decrease the impedance of the unimorph and amplify the sensing signal. The properties of sensor were calculated and measured. The measured results show a sensitivity of 0. mV/Pa, good agreement with theoretic calculation, a pressure range of 1kPa, a linearity of 1％ F.S, a response time of 40μs and a nature frequency of 8.5kHz. Compared with present congeneric sensors, it exhibits high sensitivity, simple structure and low cost.

关键词： Dynamic pressure Piezoelectric unimorph sensitivity analysis Inner preamplifier

作者: Likun Wang Lei Qin Li Li

作者单位: Beijing key laboratory for sensorBeijing Information Science & Technology UniversityBeijing 100101,C Science and Technology school Shenyang University of Chemical Technology Shenyang,110142,China

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-6

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）