Analyses on Output Signal of MEMS Gyroscope Applied to Low Speed Rotating Carrier

摘要：

MEMS gyroscope can be sensitive to the rotational angular velocity only after being driven to build upon the initial carrier of vibration. Non-driven silicon micromechanical gyroscope uses rotating carrier to generate its own rotating as the driving, but this characteristic is not suitable for low-speed rotating objects. The paper proposes solutions for this shortcoming, which is using micro motor as rotating carrier of non-driven silicon micro-mechanical gyroscope to generate gyroscopic effect which is sensitive to the attitude information, including rolling rate, yaw angular rate and pitch angular rate of low-speed rotating or non-rotating objects. Moreover, by analysing the output signals using Fast Fourier Transform(FFT) algorithm, some rules of output signals of gyroscope are gained based on simulation the low rotating object experiments of three-axis moving of MEMS.

关键词： MEMS Gyroscope Slow rotation carrier Threeaxis moving Signal analysis

作者: Wang ling Zhang fuxue

作者单位: Research Centre of Sensor Technology Beijing Information Science and Technology University Chaoyang District,Beijing,China

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-5

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）