Stable and Accurate Trajectory Control Technology for the Wafer Transfer Robot

摘要：

During the processing of wafer, in order to avoid the friction between wafer and wafer box, and to guarantee the clean state of the working environment simultaneously, small contour error and little vibration are required for wafer transfer robot to deliver wafer, i.e., to achieve stable and accurate trajectory for wafer delivery. To lessen contour error, suppress vibration, a kind of control algorithm has been proposed in this paper combining cross-coupled synchronized control and input shaping. Via cross-coupled synchronized control, synchronization of the actuating joint can be improved and the contour accuracy can be enhanced; through the shaping of the driving impulses for the shoulder joint and the elbow joint by input shaper, the vibration at the end-effector can be reduced. Based on the experiments verified on the planar joint wafer transfer robot, it shows that the synchronizing and vibration-suppressing performance is excellent by taking advantage of the method covering both cross-coupled synchronized control and input shaping.

关键词： wafer transfer robot synchronized control contour error vibration suppression input shaping

作者: Yanjie Liu Yong Hu Xiaofei Zheng

作者单位: State Key Laboratory of Robotics and System,HarbinInstitute of Technology,Harbin 150080,China State Key Laboratory of Robotics and System,Harbin Institute of Technology,Harbin 150080,China

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-5

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）