Design of a Compliant XY Stage with Embedded Force Sensor for Micro-Scale Positioning

摘要：

This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.

关键词： Flexure mechanism micro-scale positioning piezoelectric actuation optimization design

作者: Qiaokang Liang Dan Zhang Quanjun Song Yunjian Ge

作者单位: Institute of Intelligent Machines,Chinese Academy of Sciences Department of Automation,University of Canada Research Chair in Robotic & Automation Laboratory,Faculty of Engineering and Applied Science, Institute of Intelligent Machines,Chinese Academy of Sciences

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-6

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）