Fabrication Quality of Glass Microfluidic Chips
Microfluidic chips, which are of excellent properties and for biochemical testing, are researched and manufactured in this paper. The biochemical reactor cells and microchannels in glass substrates of microfluidic chips are fabricated by processes of doping, photomask and wet etching etc, surface morphology and surface roughness are measured by the stylus profiler; at the same time sample-input through-holes in glass covers of microfluidic chips are fabricated by laser machining and mechanical drilling, surface morphology and surface roughness are also measured by the metallurgical microscope. Experimental results show at last that sample-input is done smoothly through cover holes of microfluidic chips; two side surfaces of substrate channels, which are satisfied to the predesigned shapes and smoothness, are smooth and assure fluid sample-input from reactor cells to channels successfully, the manufactured microfluidic chips are of prospected properties in practical use.
Microfabrication Microfluidic chips Laser machining Glass drilling Accuracy
Junfang Ni Shihong Shi Jun Gu Tsuneaki Yamabe
School of Mechatronics University of Soochow Suzhou,Jiangsu Province,215021,China Department of Functional Machinery and Mechanics University of Shinshu Nagano,386-8567,Japan
国际会议
2010 IEEE信息与自动化国际会议(ICIA 2010)
哈尔滨
英文
1-4
2010-06-20(万方平台首次上网日期,不代表论文的发表时间)