Research on a New Microelectromechanical Hybrid Gyroscope

摘要：

Described in this paper is a new Microelectromechanical Hybrid Gyroscope(MHG), with advantages not only in the potentiality of achieving the high precision like the traditional dynamically tuned gyroscope(DTG), but also in small size and low cost like the Silicon Micromachined Gyroscope(SMG). The transfer coefficient of the moment is derived, with influence factors analyzed. A new tuning method which tuned the microelectromechanical hybrid gyroscope by negative stiffness effectiveness of the moment is adopted. An interface circuit is researched, the sensitivity equation of the interface circuit is deduced and a decoupled rebalancing control loop circuit is researched. Finally, on this basis, the prototype of the MHG is achieved. The experiment results prove that the new tuning method by negative stiffness effectiveness of the moment is feasible, and the designs of the interface circuit and rebalancing control loop are proper. The preliminary performance test of the prototype shows that the scale factor is 1.42mV/o/s, the scale factor non-linearity 2.47％and the maximum rate ±200o/s, which proves that the fundamental principle of the MHG is feasible.

关键词： Microelectromechanical Hybrid Gyroscope (MHG) negative stiffness effectiveness tuning interface circuit rebalancing control loop

作者: Bo Yang Shourong Wang Kunyu Li Xi Zhu Huiliang Cao

作者单位: School of Instrument Science & Engineering Southeast University Nanjing 210096,China

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-6

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）