Rayleigh - Sommerfeld diffraction theory to moire measurement application

摘要：

Shadow moiré method using surface warpage measurements, for some relatively smooth surface of the specimen or to obtain better precision, we have to use a smaller grating spacing, but often in light diffraction, was Measuring surface modulation information is covered, so that measurements can not proceed. In this paper, changing the optical path of the hypothesis, to solve this problem, and with Rayleigh - Sommerfeld diffraction theory, this paper proves the hypothesis.

作者: Huang Yanping Qiu Jianxin Huang Biaobing Sheng Jingqi Xu Hongji

作者单位: Department of Mechanical College Changchun University of Science and Technology Changchun City,Jilin Department of Mechanical College Changchun University of Science and Technology Shanghai University Changchun Institute of Technology/5Jilin University Institute of Shanghai electronic information Shanghai,China Department of Mechanical College Changchun University of Science and Technology Changchun City,Jilin

会议类型: 国际会议

会议名称: 2010 IEEE信息与自动化国际会议(ICIA 2010)

会议地点: 哈尔滨

会议语种:英文

页码: 1-4

在线出版日期: 2010-06-20（万方平台首次上网日期，不代表论文的发表时间）