Study on the Actuation and Positioning of Nano-CMM
The establishment technology of large distance travel actuation and positioning system with nanometer resolution based on N310 piezoelectric linear motor was studied, by which the stepping mode was used to realize the large distance travel actuation and analog mode was adopted to implement micro-distance travel actuation and positioning control. By the use of laser displacement measurement and the probe feedback control system, the fast nano-positioning in large distance travel range was achieved.
Piezoelectric linear motor large distance travel actuation and positioning nanometer resolution
Zhang Weifu Huang Qiangxian Xu Congyu Qian Jianzhao Li Rujun
School of Instrument Science and Opto-Electronic Engineering,Hefei University of Technology,Hefei 230009 China
国际会议
厦门
英文
228-232
2010-05-22(万方平台首次上网日期,不代表论文的发表时间)