Study on the Actuation and Positioning of Nano-CMM

摘要：

The establishment technology of large distance travel actuation and positioning system with nanometer resolution based on N310 piezoelectric linear motor was studied, by which the stepping mode was used to realize the large distance travel actuation and analog mode was adopted to implement micro-distance travel actuation and positioning control. By the use of laser displacement measurement and the probe feedback control system, the fast nano-positioning in large distance travel range was achieved.

关键词： Piezoelectric linear motor large distance travel actuation and positioning nanometer resolution

作者: Zhang Weifu Huang Qiangxian Xu Congyu Qian Jianzhao Li Rujun

作者单位: School of Instrument Science and Opto-Electronic Engineering,Hefei University of Technology,Hefei 230009 China

会议类型: 国际会议

会议名称: The Third International Symposium on Test Automation & Instrumentation(第三届国际自动化测试与仪器仪表学术会议 2010 ISTAI)

会议地点: 厦门

会议语种:英文

页码: 228-232

在线出版日期: 2010-05-22（万方平台首次上网日期，不代表论文的发表时间）