Application of Astigmatism Method in Parallel Confocal Microscope
The method of searching for extreme points is widely used in parallel confocal microscope, but the measurement precision is not high enough. In this paper, a cylindrical lens is added in the parallel confocal microscope system to create an astigmatism point in order to improve the axial resolution. With this optical device fixed into the imaging optical path, an elliptical facula is formed beside the infocus image, and with the help of four-quadrant method, a new light intensity and displacement curve is obtained. One standard gauge blocks thickness is set as the measured object in experiment to compare with the traditional and astigmatism methods. The result indicates that not only some errors of system can be eliminated, but also the axial resolution can be improved about 5 times than the traditional method.
Parallel confocal microscope cylindrical lens elliptical facula astigmatism method light intensity and displacement curve
Yu Qing Yu Xiaofen
School of Instrument Science and Opto-electronics Engineering,Hefei University of Technology,Hefei 230009,China
国际会议
厦门
英文
331-334
2010-05-22（万方平台首次上网日期，不代表论文的发表时间）