会议专题

Measuring Metal Expansion Coefficient by Nano-displacem-ent Measurement Method Based on Optical Lever

The nano-displacement measurement based on the principle of optical lever is a contactlessly measurement technology, which has been extensively used in industry and scientific research fields. In this study, with the aim to solve some intractable issues in existing optical lever apparatus, such as low resolving power, low precision, and discommodious reading device, we present a multi-amplify and data auto-collecting system with real time technology based on optical lever and Position Sensitive Detector (PSD) sensor, and design an apparatus to measure the linear expanding coefficient. According to the multi-amplify technology, the tiny displacement is amplified significantly, meanwhile, artificial error is eliminate based PSD sensor and Labview data collecting and analysis platform. The experimental measurements indicate that the system repeat precision of brassiness, iron, aluminum and red copper is 7.5,7.2,7.6 and 8.1 nm.

optical lever nano-displacement measurement PSD Labview linear expanding coefficient

Tan Xingwen Zhang Lei Ren Fanghui Liu Shuqiang Luo Tian

School of Physical Science and Technology,Southwest University ,Chongqing,400715 College of Electric College of Electrical Engineering,Chongqing University,Chongqing 400020 School of Physical Science and Technology,Southwest University ,Chongqing,400715

国际会议

The Third International Symposium on Test Automation & Instrumentation(第三届国际自动化测试与仪器仪表学术会议 2010 ISTAI)

厦门

英文

354-358

2010-05-22(万方平台首次上网日期,不代表论文的发表时间)