Natural Frequency Sensitivity Analysis of Three-axis Accelerometer Based on Finite Element Method
Using the finite element analysis software ANSYS10.0 to make the three-axis variable-capacitance micromechanical accelerometer Finite Element Model, and based on which to analyze the top three natural frequencies and their vibration mode of the accelerometer. The correlation analysis showed that the first and the second vibration mode effect on X/Y-axis measure precision of the acceleration, respectively, but the third vibration mode have greater effects on Z-axis measure precision. According to the analysis of the accelerometer structure parameters such as width, height, length of flexible shaft and the height and density of the mass block, it may provide a theoretical basis and analysis method for accelerometer anti-vibration or optimal design.
Finite Element Method Accelerometer Natural Frequency Sensitivity Analysis
Wu Zhenting Wang Yanmin
Luohe Vocational and Technical College,Henan Luobe 462002,China
国际会议
厦门
英文
417-421
2010-05-22（万方平台首次上网日期，不代表论文的发表时间）