Analytical Model For The Size Effect On The Micro-beam Deformation in MEMS
A static deformation model for analyzing the microbeam is presented based on the size effect on the mechanical behavior which is result of the micro-beam contour size in microns. Compare the finite element simulation results with those of analytical modeling, and it is found that both results are consistent when the driving voltage reaches 84％of the threshold voltage. The main conclusions show that the effective modulus of elasticity and the deflection of the micro-beam will reveal significant size effect when micro-beam contour size decreases to a value which is comparable to the material length scale parameter, as well as, the deformation deflection will jump when the driving voltage reaches a certain value.
Micro-beam size-effect analytical model
Chen Meiqin Su Jilong
The College Of Mechanical and Electrical Engineering,Fujian Agriculture and Forestry University,Fuzhou350002 China
国际会议
厦门
英文
1159-1163
2010-05-22（万方平台首次上网日期，不代表论文的发表时间）