Study on Fabrication and Properties of Copper–Tin–oxide Thin Films

摘要：

Copper-tin-oxide thin films have been prepared on quartz substrates by the magnetron sputtering method. The structural,optical and electrical properties were investigated. The prepared samples were amorphous, CuSnO3 single crystalline grains with perovskite structure were observed after annealing temperature was above 530℃. The optical and electrical properties had great dependence with reactive gas pressure and annealing temperature. Thermal probe reveals p type conductivity of some samples.

关键词： Magnetron sputtering CuSnO3 Perovskite structure

作者: Ti Ning Feng Ji Jin Ma Zhenguo Song Xuan Pei Yongliang Tan

会议类型: 国际会议

会议名称: 第二届多功能材料与结构国际会议

会议地点: 青岛

会议语种:英文

页码: 787-790

在线出版日期: 2009-10-09（万方平台首次上网日期，不代表论文的发表时间）